Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies
by Y. Pauleau
2002384 pages
Springer·1 editions
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Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies (2002)
Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies (2002)
Springer
Springer
Hardcover
ISBN 10: 1402005245
ISBN 13: 9781402005244