CVD growth and material quality control of silicon carbide
by Jie Zhang
2001215 pages
Dept. of Physics and Measurement Technology, Linköpings universitet·1 editions
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CVD growth and material quality control of silicon carbide (2001)
CVD growth and material quality control of silicon carbide (2001)
Dept. of Physics and Measurement Technology, Linköpings universitet
Dept. of Physics and Measurement Technology, Linköpings universitet
ISBN 10: 9173730971