High Energy and High Dose Ion Implantation
by Symposium C on High Energy Ion Implantation (1991 Strasbourg, France), S. U. Campisano, J. Gyulai, P. L. F. Hemment
1992320 pages
North-Holland·3 editions
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High Energy and High Dose Ion Implantation (1992)
High Energy and High Dose Ion Implantation (1992)
North-Holland
North-Holland
ISBN 10: 0444894187
ISBN 13: 9780444894182