Radio Frequency Power in Plasmas
by Cynthia K. Phillips, Wilson, James R.
2012570 pages
American Institute of Physics·1 editions
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Radio Frequency Power in Plasmas : (2012)
Radio Frequency Power in Plasmas : (2012)
American Institute of Physics
American Institute of Physics
paperback
ISBN 10: 0735409781
ISBN 13: 9780735409781