Micro-electro-mechanical systems (MEMS)--1999
1999611 pages
American Society of Mechanical Engineers·1 editions
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Micro-electro-mechanical systems (MEMS)--1999 (1999)
Micro-electro-mechanical systems (MEMS)--1999 (1999)
American Society of Mechanical Engineers
American Society of Mechanical Engineers
ISBN 10: 0791816389