Fast Simulation of Electro-Thermal MEMS: Efficient Dynamic Compact Models (Microtechnology and MEMS)
by Tamara Bechtold, Evgenii B. Rudnyi, Jan G. Korvink
2006180 pages
Springer·1 editions
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Fast Simulation of Electro-Thermal MEMS: Efficient Dynamic Compact Models (Microtechnology and MEMS) (2006)
Fast Simulation of Electro-Thermal MEMS: Efficient Dynamic Compact Models (Microtechnology and MEMS) (2006)
Springer
Springer
ISBN 10: 3540346139
ISBN 13: 9783540346135