Defect engineering in semiconductor growth, processing, and device technology
by S. Ashok, J. Chevallier, K. Sumino
19921144 pages
Materials Research Society·2 editions
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Defect engineering in semiconductor growth, processing, and device technology (1992)
Defect engineering in semiconductor growth, processing, and device technology (1992)
Materials Research Society
Materials Research Society
ISBN 10: 1558991573