Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography
1993702 pages
SPIE·1 editions
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Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography (1993)
Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography (1993)
SPIE
SPIE
ISBN 10: 0819409154