Dielectric films for advanced microelectronics
by Mikhail Baklanov, Martin Green, Karen Maex
2007486 pages
John Wiley & Sons·3 editions
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Dielectric films for advanced microelectronics (2007)
Dielectric films for advanced microelectronics (2007)
John Wiley & Sons
John Wiley & Sons
ISBN 10: 0470013605
ISBN 13: 9780470013601