Smart sensors, actuators, and MEMS IV
by Schmid, Ulrich Prof, Carles Cané, Herbert R.. Shea
2009
SPIE·1 editions
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Smart sensors, actuators, and MEMS IV (2009)
Smart sensors, actuators, and MEMS IV (2009)
SPIE
SPIE
ISBN 10: 0819476366
ISBN 13: 9780819476364