Tribology In Chemical-Mechanical Planarization
by Hong Liang, Hong Liang, David Craven
2005200 pages
CRC·7 editions
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Tribology In Chemical-Mechanical Planarization (2005)
Tribology In Chemical-Mechanical Planarization (2005)
CRC
CRC
Hardcover
ISBN 10: 0824725670
ISBN 13: 9780824725679