Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses
by Christopher L. Borst, Christopher Lyle Borst, William N. Gill, Ronald J. Gutmann
2002248 pages
Springer·4 editions
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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses (2002)
Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses (2002)
Springer
Springer
Hardcover
ISBN 10: 1402071930
ISBN 13: 9781402071935