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Kevin M. Monahan | lit.salon

Author

Kevin M. Monahan

6 works

1985–2003 across 6 dated works

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Micron and submicron integrated circuit metrology: August 22-23, 1985, San Diego, California1985
Integrated circuit metrology, inspection, and process control: [papers]1987
Integrated circuit metrology, inspection, and process control II: 29 February-1 March 1988, Santa Clara, California1988
Integrated circuit metrology, inspection, and process control III: 27-28 February 1989, Los Angeles, California1989

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Integrated circuit metrology, inspection, and process control: [papers]1987
2 editions
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Integrated circuit metrology, inspection, and process control III: 27-28 February 1989, Los Angeles, California1989
2 editions
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Micron and submicron integrated circuit metrology: August 22-23, 1985, San Diego, California1985
1 edition
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Integrated circuit metrology, inspection, and process control II: 29 February-1 March 1988, Santa Clara, California1988
3 editions
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Cost and performance in integrated circuit creation: 27-28 February 2003, Santa Clara, California, USA2003
With Alfred Kwok-Kit Wong
1 edition
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Handbook of critical dimension metrology and process control1994
1 edition
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