Micro-electro-mechanical systems (MEMS) 1998
by Ga.) International Mechanical Engineering Congress and Exposition (1996 : Atlanta
1998593 pages
American Society of Mechanical Engineers·2 editions
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Micro-electro-mechanical systems (MEMS) 1998 (1998)
Micro-electro-mechanical systems (MEMS) 1998 (1998)
American Society of Mechanical Engineers
American Society of Mechanical Engineers
ISBN 10: 079181596X