Materials Science of Microelectromechanical Systems (Mems) Devices III: Symposium Held November 27-28, 2000, Boston, Massachusetts, U.S.A (Symposium Proceedings Series Volume 657)
by Maarten de deBoer, Michael Judy, S. Mark Spearing
2001348 pages
Materials Research Society·1 editions
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Materials Science of Microelectromechanical Systems (Mems) Devices III: Symposium Held November 27-28, 2000, Boston, Massachusetts, U.S.A (Symposium Proceedings Series Volume 657) (2001)
Materials Science of Microelectromechanical Systems (Mems) Devices III: Symposium Held November 27-28, 2000, Boston, Massachusetts, U.S.A (Symposium Proceedings Series Volume 657) (2001)
Materials Research Society
Materials Research Society
Hardcover
ISBN 10: 1558995676
ISBN 13: 9781558995673